Nuclear techniques, namely Rutherford Back Scattering (RBS) and Elastic Recoil Detection (ERD) have been used in the analysis of the implanted samples. The sensitivity of the RBS method depends on the atomic number of the implanted elements as Z². Thus, there is a possibility of measuring very low concentrations of heavy ions implanted in a light matrix. The depth profile of oxygen was obtained using elastic resonance in the nuclear reaction ¹⁶O(⁴He, ⁴He) ¹⁶O at 3.045 MeV of ⁴He ions. The ERD technique was applied to obtain the depth profile of hydrogen. Some problems concerning the roughness of the implanted samples are discussed as well.